SUBSTRATE TRANSFER METHOD, DEVICE MANUFACTURING METHOD, AND SUBSTRATE TRANSFER DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a substrate transfer method capable of suppressing distortion of a substrate generated when delivering the substrate, a device manufacturing method, and a substrate transfer device.SOLUTION: The substrate transfer method is to transfer a substrate placed on a substrate support member together with the substrate support member. The substrate transfer method is to transfer the substrate by placing the substrate on the substrate support member after supporting a part to be supported of the substrate support member in a state where the substrate support member is bent so that a shape of the substrate support member becomes a shape equivalent to a shape of the substrate support member when being transferred in a state of supporting the substrate.SELECTED DRAWING: Figure 1