发明名称 SHEET PEELING DEVICE AND PEELING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a sheet peeling device and a peeling method that prevent the device from being larger and control from being more complicated.SOLUTION: A sheet peeling device 10 comprises cutting means 20 of forming a cut in an adhesive sheet AS having a frame RF and an adherend WF united, and conveying means 30 of conveying the frame RF to a frame collection position by moving the frame RF and adherend WF relatively in a predetermined conveyance direction TD, and the cutting means 20 forms the cut CU which has one end CU1 and the other end CU2 on a side leaving the adherend WF to a reference line SL1 passing a peeling start end edge WF1 and parallel with an orthogonal line SL, and connects with the reference line SL1 to cover the adherend WF on the side of the adherend WF, the peeling start end edge WF1 being the position where the orthogonal line SL abuts first on a position where the adhesive sheet AS and adherend WF adjoin each other when the orthogonal line SL orthogonal to a conveyance direction is moved in the conveyance direction TD from outside the adherend WF.SELECTED DRAWING: Figure 1
申请公布号 JP2016154198(A) 申请公布日期 2016.08.25
申请号 JP20150032220 申请日期 2015.02.20
申请人 LINTEC CORP 发明人 SUGISHITA YOSHIAKI
分类号 H01L21/683 主分类号 H01L21/683
代理机构 代理人
主权项
地址