| 摘要 |
PURPOSE:To obtain the improved coefficient of the electric-mechanical coupled substance by selecting the optimum cutting angle and the measurement of the tuning fork for the tuning fork type flexed crystal oscillator. CONSTITUTION:Tuning fork type crytal oscillator 1 is formed by the following method: the first exciting electrodes 4 and 5 are formed through the photolithography method; and then the etching is applied to the tuning fork type crsytal. After this, side electrodes 7 and 8 of the tuning fork type crystal are formed by the masking with evaporation or the sputtering method. In order to enhance the electric- mechanical conversion efficiency of oscillator 1, the electrodes are distributed so that the field component of the X-axial direction may be maximum at the outside area of the tuning fork arm. |
