发明名称 Sensing probe for determining location of conductive features
摘要 A sensing apparatus for determining the precise location of a conductive feature on an insulating substrate which has a base, a plurality of flexible flat elongated contact blade elements having end portions for contacting and establishing electrical contact to a conductive surface feature, insulating means between the blade elements, and a base member for supporting the blade elements in a bowed condition with the end portions arranged in a plane parallel to the plane of the top surface of the insulating substrate.
申请公布号 US4227149(A) 申请公布日期 1980.10.07
申请号 US19780910253 申请日期 1978.05.30
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 FAURE, LOUIS H.;HODGE, PHILO B.
分类号 H01L21/68;G01R1/073;G01R31/28;H01L21/66;(IPC1-7):G01R1/07;G01R31/02 主分类号 H01L21/68
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