发明名称 |
Sensing probe for determining location of conductive features |
摘要 |
A sensing apparatus for determining the precise location of a conductive feature on an insulating substrate which has a base, a plurality of flexible flat elongated contact blade elements having end portions for contacting and establishing electrical contact to a conductive surface feature, insulating means between the blade elements, and a base member for supporting the blade elements in a bowed condition with the end portions arranged in a plane parallel to the plane of the top surface of the insulating substrate.
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申请公布号 |
US4227149(A) |
申请公布日期 |
1980.10.07 |
申请号 |
US19780910253 |
申请日期 |
1978.05.30 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
FAURE, LOUIS H.;HODGE, PHILO B. |
分类号 |
H01L21/68;G01R1/073;G01R31/28;H01L21/66;(IPC1-7):G01R1/07;G01R31/02 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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