| 摘要 |
<p>PURPOSE:To allow a larger stage movement utilizing an effective space within a vacuum chamber, by a method wherein an X stage is placed on a stage base and, moreover, a Y stage is placed thereon. CONSTITUTION:An X stage 6 is placed on a stage base 24 set within a vacuum chamber 1 and moreover, a Y stage 7 thereon 6. With the rotation of a ball screw 18 connected to an X axis motor 2, a slider 16 linked to an X drive shaft 3 moves along a guide shaft 20 to move the X stage 6 mounted at the tip of the X drive shaft 3 in the X axis. Likewise, with the rotation of a ball screw 19 linked to a Y-axis motor 4, a slider 17 linked to a Y drive shaft 5 moves along a guide shaft 21. The motion of the Y drive shaft 5 is transmitted to the Y stage 7 through a guide rail 10 and through a shaft joint comprising rollers 9a and 9b.</p> |
