| 摘要 |
PURPOSE:To prevent the occurrence of a crack on the surface and the exfoliation of a deposition material attached on the surface by forming a rough surface of the member composing such devices as a reactor tube and a board. CONSTITUTION:A near frosted glass and rough inside surface 6a is formed in the inside of the surface of a quartz reactor tube 6 by blowing a quartz powder. If an SiO2 film 7 is precipitated on the reactor tube 6, no crack will cause on the SiO2 film 7 attached to the inside of the surface 6a and the surface 6a and the scattering of the precipitation material contained small pieces of the quartz will not a occur. If the inside of the surface of the stainless steel reactor tube is made rough, the exfoliation of the attached precipitation film is almost eliminated and the crack will not occur for the reactor tube. As the reacted and precipitated thin films, the same effect will be obtained for simplex films such as an Si nitride film, poly Si, phosporus pentaoxide, mixed films, multilayer films and others. |
