| 摘要 |
PURPOSE:To obtain a high output and compact device without oil contamination by providing a vacuum chamber in a housing and housing both an electron beam generation electrode and an X-ray generation rotary electrode in this vacuum chamber. CONSTITUTION:The axis of rotation 22 supported by the bearing 30 which is provided in the housing revolves the motor consisting of the stator winding 24a and the rotor winding 24b. The rotary target 17 for generating X rays is mounted on one end of the axis of rotation 22. The fixed blade 18b on the housing and the rotary blade 18a provided on the axis of rotation form a turbo-molecular pump. The pipe 23 which circulates cooling water is provided inside the axis of rotation 22. Both the electron gun 26 and the deflection yoke 27 are provided in the vacuum chamber 19. The X-ray generated from the X-ray turget 17 is removed outside from the transparent window 28. |
