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发明名称
ELECTRON MICROSCOPE
摘要
申请公布号
JPS55126951(A)
申请公布日期
1980.10.01
申请号
JP19790033378
申请日期
1979.03.23
申请人
HITACHI LTD
发明人
KUBOZOE MORIKI;KATSUTA SADAJI;MATSUI ISAO;TERAKADO SADAO
分类号
H01J37/141;H01J37/10;H01J37/26
主分类号
H01J37/141
代理机构
代理人
主权项
地址
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