发明名称 XXRAY EXPOSURE DEVICE
摘要 PURPOSE:To eliminate a partial shadow or the distortion of an image by converting an X-ray beam into a parallel beam wherein a crystal fixed by the wave length of X- rays and grid composition is arranged in an X-ray beam applied from a target. CONSTITUTION:A crystal 9 fixed by the wave length of a used X-ray and grid composition is arranged in the X-ray beam applied from a target 2. The X-ray beam is converted into a parallel beam by a specific diffraction surface 10 in the crystal. The X-ray beam converted into the parallel beam passes through a slit 12 and reaches a photosensitive plastic film 4 on a substrate 3 through a mask 5. In this case, the X-ray beam passed the crystal 9 has an oval section and almost becomes a rectangular section after passing the slit 12. In this way, a partial shadow and the distortion of an image will be eliminated and it is also absolutely unnecessary any electronic lens system required for narrowly diaphragming an electronic beam.
申请公布号 JPS55127020(A) 申请公布日期 1980.10.01
申请号 JP19790034291 申请日期 1979.03.26
申请人 NIPPON TELEGRAPH & TELEPHONE 发明人 OZAKI YOSHIHARU
分类号 G03B42/02;G03B27/02;H01L21/027;H01L21/30 主分类号 G03B42/02
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