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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS55125672(A)
申请公布日期
1980.09.27
申请号
JP19790032294
申请日期
1979.03.22
申请人
HITACHI LTD
发明人
KURODA SHIGEO
分类号
H01L29/73;H01L21/331;H01L29/08;H01L29/72
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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