| 摘要 |
PURPOSE:To manufacture the sensor that has a ceramic layer with a strong adhesion and an excellent durability by applying a ceramic plasma injection to the electrode in the exhaust gas side to make temperature of the ceramic particles a specific value or more. CONSTITUTION:After the electrodes 10, 11 are provided on the surface of the sintered body 9 that is made of oxygen ion conductive solid electrolyte to which Y2O3 is added, the overcoat layer 12 is formed on the electrode 10 in the exhaust gas side by ceramic plasma injection. When an increase of temperature of the sintered body 9 per unit time caused by the plasma injection, specific heat and weight of the body 9 are T', C' and W respectively and the specific heat of ceramic particles that form the overcoat layer 12 and the weight of attached ceramic particles per unit time are C and W respectively, the injection condition is controlled so that temperature of the ceramic particles, which is shown by the ratio T'.C'.W/C.w, is made 1500 deg.C or more. |
