| 摘要 |
PURPOSE:To accomplish the efficiency of inspection by facilitating the card change while the matching of the measuring terminal is completed in an extremely short space of time. CONSTITUTION:A ring 16 is fixed on the holder 12 with a screw 20 with an aid of a positioning pin 19 and a positioning hole of the holder 12. It is also positioned with a screw on the holder 11 (base 10). As the base 10 is lifted, the measuring terminal 15 comes in contact with the electrode of a wafer 9 accurately. With the connection end of a desired card 24 having an auxiliary ring 25 inserted thereinto, the holder 23 is lowered along the post 22 to connect the rings 16 and 25 together electrically for inspection of the characteristics of the element. In this arrangement, the card change can be done in an extremely short space of time. In case of damage to the measuring terminal 15, to replace the ring 16, the screw 20 is unscrewed to remove the ring 16 and a new ring 16 is loaded with an aid of the positioning pin 19 of the ring holder 12. Once the ring holder 12 is positioned accurately, additional positioning is not necessary for each replacement of the ring. |
