| 摘要 |
PURPOSE:To accomplish free change in the component and the construction of the film to be formed by giving an electronic impact and a heating to gas as component of the evaporated after introduced into a vacuum chamber where the substrate is arranged. CONSTITUTION:Gas whose flow rate has been regulated is introduced into a vacucum bell-jar 1 through a nozzle 4. Then, the gas is given an electronic impact from an electrode 5 positively viased with respect to the filament 6 and ionized as well as decomposed. In addition, with the heating of the filament, the gas particle is heated to relax the bondage thereby helping the decomposition. Then, as these particles reach the substrate 7, an evaporation film is formed. At this point, the components of the film can be changed by heating the substrate 7 with a filament 9. This enables the free production of the film varied in the component and the structure from single element to various kinds of elements. |
