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发明名称
MASSSSPECTROMETER APPARATUS
摘要
申请公布号
JPS55125265(A)
申请公布日期
1980.09.26
申请号
JP19790031963
申请日期
1979.03.19
申请人
NIPPON ELECTRIC CO
发明人
SETO GIICHI
分类号
H01J37/317;C23C14/48;H01J49/28;H01L21/265
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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