VERFAHREN UND VORRICHTUNG ZUR VAKUUMHALTERUNG VON HALBLEITERSCHEIBEN FUER ABSTANDSBELICHTUNG,申请号DD19790213305-传众专利搜索

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发明名称	VERFAHREN UND VORRICHTUNG ZUR VAKUUMHALTERUNG VON HALBLEITERSCHEIBEN FUER ABSTANDSBELICHTUNG
摘要
申请公布号	DD144140(A1)	申请公布日期	1980.09.24
申请号	DD19790213305	申请日期	1979.05.31
申请人	FELBER,REINMAR,DD;ECKOLD,DIETER,DD;ULRICH,DETLEV-WILFRIED,DD;WESTPHAL,PETER,DD;WALTHER,KLAUS,DD	发明人	FELBER,REINMAR,DD;ECKOLD,DIETER,DD;ULRICH,DETLEV-WILFRIED,DD;WESTPHAL,PETER,DD;WALTHER,KLAUS,DD
分类号	H01L21/68;(IPC1-7):H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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