| 摘要 |
PURPOSE:To make it possible to set a coupling coefficient large even in a high-frequency area by interposing an insulating film, grown being oriented, as an intermediate layer between a glass substrate and zinc oxide film and then by providing comb line electrodes between the zinc oxide film and the intermediate layer. CONSTITUTION:On glass substrate 1, a zinc oxide film is formed as intermediate layer 5 by high-frequency sputtering. On intermediate layer 5, aluminum is vapor- deposited and comb line electrodes 3 are formed by photolithographing. Further, zinc oxide film 2 is generated by sputtering. Then, aluminum is formed as short electrode 4 by vapor-depositing. In addition to the zinc oxide film of an insulator growing being oriented, intermediate layer 5 may use as an aluminum oxide, magnesium oxide, etc. As a result, an elastic surface wave element with a high electromechanical coupling coefficient and expanded service frequency can be obtained. |
