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摘要
申请公布号
JPS5536182(B2)
申请公布日期
1980.09.19
申请号
JP19730116054
申请日期
1973.10.15
申请人
发明人
分类号
H01L21/30;G03D5/04;G03F7/30;G03F9/00;H01L21/027;H01L21/306
主分类号
H01L21/30
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