发明名称 |
WERKWIJZE TER VERVAARDIGING VAN EEN HALFGELEIDER- INRICHTING. |
摘要 |
A method of making a semiconductor device is described which combines ion implantation with another process of forming an impurity-containing semiconductor region. In particular, a surface-adjoining region of a semiconductor is formed in such manner that the portion of that region adjacent the surface is formed by a process other than ion implantation, whereas a surface remote or buried portion of that region which defines a P-N junction is formed by ion implantation. This combination of steps yields improved semiconductor devices. |
申请公布号 |
NL163671(C) |
申请公布日期 |
1980.09.15 |
申请号 |
NL19700017273 |
申请日期 |
1970.11.26 |
申请人 |
N.V. PHILIPS' GLOEILAMPENFABRIEKEN, EINDHOVEN. |
发明人 |
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分类号 |
H01L21/00;H01L23/485;(IPC1-7):01L21/265;01L21/31 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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