摘要 |
1287134 Integrated circuits SONY CORP 30 Oct 1969 [30 Oct 1968 (2)] 53224/69 Heading H1K An integrated circuit arrangement comprises regions of monocrystalline semi-conductor and a high resistivity isolating region of polycrystalline semi-conductor vapour deposited side by side on a monocrystalline substrate the doping concentration of the polycrystalline material lying between 10<SP>12</SP> and 10<SP>17</SP> atoms/cc. so that its resistivity is substantially greater than that of similarly doped monocrystal. A circuit consisting of two diodes connected in parallel with their cathodes commoned is made by forming a network of seeding sites consisting of silica or silicon nitride on an N + silicon wafer, and depositing appropriately doped silicon to a depth of 8Á to provide monocrystal N regions isolated by a high resistivity polycrystalline network. The diode anodes are formed in the N regions and provided with aluminium electrodes by standard planar techniques and a gold cathode deposited on the back of the wafer. In another embodiment using a P-type starting wafer diffused N+ inclusions are provided in apertures in the seeding network prior to deposition of the N-type material, and base, emitter, and collector contact regions formed subsequently in the monocrystal islands by diffusion. In a modification of this silicon is used as seeding material. The remaining embodiments are essentially as described in Specification 1,251,348. Reference has been directed by the Comptroller to Specification 1,251,348. |