| 摘要 |
PURPOSE:To obtain a gamma-hematite film that has stable coercive force which enables writing operation with a magnetic head by a method wherein a magnetite film is formed by a reactive evaporating method under a specified condition and treated by oxidization at 300 deg.C or less. CONSTITUTION:By a reactive evaporating method under the conditions which satisfy two or more of the conditions, that is oxygen pressure, applying rate, substrate temprature and film thickness respectively 5X10<-4> Torr and more, 60Angstrom /sec or less, 150 deg.C or less and 2300Angstrom or less, the film of which the chief ingredient is magnetite (Fe3O4) is formed. And by oxidizating treatment at 300 deg.C or less it is converted to a magnetic thin film of which the chief ingredient is gamma-hematite (gamma- Fe2O3). |
