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发明名称
IC STEM
摘要
申请公布号
JPS55115351(A)
申请公布日期
1980.09.05
申请号
JP19790022396
申请日期
1979.02.26
申请人
FUJITSU LTD
发明人
SHIMOHASHI AKIRA
分类号
H01L23/50;H01L21/60
主分类号
H01L23/50
代理机构
代理人
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