| 摘要 |
PURPOSE:To remove background automatically and exactly by the procedure in which electron rays are irradiated alternately on a point of sample to be analyzed and a point on a sample holder, permeated electron rays are detected, and difference between both is calculated. CONSTITUTION:When the point A to be analyzed on a sample is exposed to electron rays, the rays premeate through the sample and the sample holding membrane and signal put in the amplifier 13 through the energy analyzer 11 and the detector 12 is sent to the multichannel analyzer 15A. Then, when the point B on the sample holding membrane is exposed to electron rays, the rays permeate through the sample holding membrane 2 and signal put in the amplifier 13 is sent to the multichannel analyzer 15B. The signals memorized in the analyzers 15A and 15B are subjected to substraction at the substractive circuit 16 and energy spectrum having information on the only point to be analyzed on the sample is displayed on the displayer 17. |
