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发明名称
VERFAHREN UND VORRICHTUNG ZUR QUALITAETSKONTROLLE WAEHREND DER SILIZIUM-BAUELEMENTEFERTIGUNG
摘要
申请公布号
DD143674(A1)
申请公布日期
1980.09.03
申请号
DD19790212825
申请日期
1979.05.11
申请人
GRUNOW,CHRISTIAN,DD
发明人
GRUNOW,CHRISTIAN,DD
分类号
H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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