| 摘要 |
PURPOSE:To enable miniaturization and ease high speed deflection by providing a pyramidal rotary mirror and a scanning mirror and letting the scanning mirror turn about the rotating axis deviated from the scanning mirror surface. CONSTITUTION:A Y-direction scanning mirror M2 is turned along the circumference C about the axis O deviated from the scanning mirror surface. The scanning mirror M2 is mounted by leaving a distance from the axis O, by, e.g., an arm A. If it is reciprocatively turned within the range of the specified angle, the incident light L is scanned subsequently in the respective directions of La, Lb, Lc. At this time the range d where the incident light moves on the surface of the rotary mirror M1 is smaller than conventional method, hence the height of the rotary mirror M1 may be made smaller. Further, the deflection point P in the Y direction may be approached very closely to the mirror surface of the rotary mirror M2 being the deflection point in the X direction and therefore this becomes advantageous even in aberrations of optical system. |
