发明名称 REGENERATING METHOD OF DEVELOPER FOR PHOTOSENSITIVE RESIN
摘要 PURPOSE:To regenerate a developer without causing hindrances such as defective heat transfer, clogging, etc. due to polymer adhesion by adding a polymerization inhibitor whose b.p. is higher than that of the developer to the developer containing dissolved unhardened photosensitive resin after developing a photopolymerization type photosensitive resin layer and by distilling the inhibitor-added developer. CONSTITUTION:A photopolymerization type photosensitive resin layer is exposed, and the unexposed portion is dissolution-removed with a developer. When the amt. of unhardened photosensitive resin dissolved in the developer is increased, the developer becomes unreusable. So, before the developer is recovered by distillation, a polymerization inhibitor whose b.p. is higher than that of the developer is added, e.g. p-tertiary-butylcatechol in case the developer is based on 1,1,1-trichloroethane. Thus, smooth distillation is enabled without causing hindrances such as lowered heat conductivity and tube clogging due to adhesion of a polymer to a distiller, resulting in saved heat consumption and increased recovering efficiency. The recovered developer can be used like a fresh one.
申请公布号 JPS55113042(A) 申请公布日期 1980.09.01
申请号 JP19790020986 申请日期 1979.02.23
申请人 MATSUSHITA ELECTRIC WORKS LTD 发明人 KUNITOMI TETSUO
分类号 H01L21/30;G03F7/30;G03F7/32;H01L21/027 主分类号 H01L21/30
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