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经营范围
发明名称
LIGHTTANNEALING
摘要
申请公布号
JPS55113336(A)
申请公布日期
1980.09.01
申请号
JP19790019767
申请日期
1979.02.23
申请人
CHO LSI GIJUTSU KENKYU KUMIAI
发明人
IWAMATSU SEIICHI
分类号
H01L21/26;H01L21/324
主分类号
H01L21/26
代理机构
代理人
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地址
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