| 摘要 |
PURPOSE:To prevent the contamination of the objects to be treated such as machine parts by refining the Ar gas recovered from the high pressure vessel after the captioned treatment continuously through hydrogenation reduction, liquefaction separation and adsorption thereby recovering the same. CONSTITUTION:After refined Ar gas of a gas holder 2 is packed into a high pressure vessel 1 containing the objects to be treated and is boosed with compressors 3, 4, valves V1, V2 are closed and the captioned treatment is done. During this time, the Ar is polluted by the entry of air, oil decomposted CO, H2, etc. and the repeated use of Ar results in increased impurity contents and this becomes the problem of the contamination of the treated porducts. After the completion of the treatment, the valve V3 and reducing valve V4 are opened, through which the Ar is naturally recovered and the objects to be treated are taken out, thus the above operations are repeated. The recovered crude Ar is added with H2 from a feed pipe 10, after which its impurity O2 is made into water by the catalyst of a reaction unit 6 and is condensed in a heat exchanger 7, thence it is discharged from a separator 8. The crude Ar is further pressed at above the pressure of the holder 2 by a compressor 9 and it is removed of water, H2, N2, etc. by changeable adsorbers 5, 5', thence it is recovered into the holder 2. |
