Automatic Photomask Alignment System for Projection Printing,申请号GB19790042386-传众专利搜索

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发明名称	Automatic Photomask Alignment System for Projection Printing
摘要
申请公布号	GB2040444(A)	申请公布日期	1980.08.28
申请号	GB19790042386	申请日期	1979.12.07
申请人	RCA CORP	发明人
分类号	G03B27/32;G03F9/00;H01L21/027;H01L21/30;(IPC1-7):G05D3/12	主分类号	G03B27/32
代理机构		代理人
主权项
地址

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