发明名称 ABRASIVE POWDER AND ABRASIVE METHOD
摘要 PURPOSE:To obtain abrasive powder suitable for polishing of stable, high quality and efficiency brittle material and the like without doing harm to a human body by using water solution as main agent whose main component is sodium bromate. CONSTITUTION:Water solution whose main component is sodium bromate is used for abrasive powder as main agent. Particles insoluble in the said sodium bromate water solution may be mixed or surface active agent may be added. A polishing machine equipped with a modified ring 3 for polishing a workpiece 2 employs a metal 3' for decomposing sodium bromate arranged on a part of a surface at the side of a polisher 1 of the modified ring 3 for polishing the workpiece 2. Or water solution in which metal fine-grain decomposing sodium bromate filled in a vessel other than the vessel 13 of said abrasive powder is contained or dispersed polishes the workpiece 2 on which the water solution is dropped just before or just after said abrasive powder 10 is dropped on the surface at the side of the polisher 1 of the modified ring 3.
申请公布号 JPH01187930(A) 申请公布日期 1989.07.27
申请号 JP19880012995 申请日期 1988.01.22
申请人 NIPPON TELEGR & TELEPH CORP <NTT>;NIPPON SHIRIKA KOGYO KK 发明人 DOI TOSHIRO;NAKADA HIROSHI;KUNIMITSU YOSHIHIKO
分类号 H01L21/304;B24B1/00;B24B57/02;C09K3/14;H01L21/306 主分类号 H01L21/304
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