发明名称 MOVABLE TABLE DEVICE
摘要 PURPOSE:To prevent deviation of a retainer by making the movement of the retainer half as large as the movement of a table and making the movement of the intermediate point of a bellows coincide with the movement of the table. CONSTITUTION:Tables 5 and 6 are fitted with four straight guide rails 3. A one- dimension-movement table, fitted with retainer 1 and rotors 2, is mounted on base 7 sealed by specimen chamber 8. Movement control rod 9 is sealed airtight by bellows 11 at the place where it passes through the specimen chamber 8, and it is connected to table 5 by means of metal connector 10. In a general bellows, since the spring constants of the crests are equal, the ratio of operation of moving end 12 and midpoint 14 is 2:1. The ratio of operation of table 5 to retainer 1 is 2:1, and the operation of midpoint 14 coincides with the operation retainer 1. For this reason, when retainer 1 and midpoint 14 are connected, deviation of retainer 1 can be checked.
申请公布号 JPS55108734(A) 申请公布日期 1980.08.21
申请号 JP19790014926 申请日期 1979.02.14
申请人 TOKYO SHIBAURA ELECTRIC CO 发明人 HORI KOUHEI
分类号 H01L21/027;H01J37/20 主分类号 H01L21/027
代理机构 代理人
主权项
地址