| 摘要 |
PURPOSE:To eliminate charge up to be caused by lubricant oil by coating synthetic fluorine lubricant on mechanically sliding parts in a vacuum tank of an electron beam exposure device. CONSTITUTION:Synthetic fluorine lubricant is a lubricant oil devloped from the consideration of the fact that fluorine resin has a low friction coefficient and that it has no tackiness. It has relatively low cohesive energy, smaller than 1800(calmol<-1>) as expressed by Equation I. For maintenance, the sliding parts in the movable structures of the device are throughly cleaned and then they are coated with thin synthetic fluorine lubricant oil. As a result, even if a minute quantity of lubricant is evaporated, when it is exposed to an electron beam, it is decomposed into CF2 gas, CF3 gas, and O2 gas, and these gases are sucked into a exhaust device connected to vacuum tank 1 and are removed. |
