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发明名称
VERFAHREN ZUR HERSTELLUNG VON KONTAKTEN AN HALBLEITERBAUELEMENTEN
摘要
申请公布号
DE3004480(A1)
申请公布日期
1980.08.21
申请号
DE19803004480
申请日期
1980.02.07
申请人
DEUTSCHE ITT INDUSTRIES GMBH
发明人
MICHAEL YOUNG,JOHN;PALEN PERRY,JOSEPH;HENRY WAKEFIELD,ROBERT
分类号
H01L21/283;H01L21/033;(IPC1-7):H01L21/28;H01L21/72
主分类号
H01L21/283
代理机构
代理人
主权项
地址
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