| 摘要 |
PURPOSE:To obtain a uniform distribution of metallizing coating thickness which is not inferior to that obtained by using an annular magnetic pole of a large diameter, by using a magnetic pole, in which a number of small-sized permanent magnet are arranged annularly, in a plasma-focusing magnetic field generation unit installed at the cathode. CONSTITUTION:Use of a magnetic pole made by arranging a number of small permanent magnets 6 annularly on the peripheral part of a circular yoke of convex section gives a plasma-focusing effect which is not inferior to that given when a large annular magnetic pole of the same bore is used, thereby forming metallizing coating of uniform thickness distribution at a low cost and at a high efficiency. |
