发明名称 Apparatus for the zone pulling of monocrystal rods
摘要 An apparatus for the zone drawing of monocrystal rods comprises a hermetically sealed housing having two rod holders movably disposed rotatably and vertically one over the other within the housing. A stationary high frequency heating system is disposed between the rod holders. Each rod holder comprises one transport slide, a sliding guide and a spindle drive disposed within the housing for the independent vertical movement of the rod holders and one drive for the rotation of the rod holders.
申请公布号 US4218424(A) 申请公布日期 1980.08.19
申请号 US19770830379 申请日期 1977.09.02
申请人 LEYBOLD-HERAEUS GMBH & CO KG 发明人 BUBECK, FRIEDRICH;DRECHSEL, DIETRICH;FLOYMAYR, JOACHIM;JERICHO, KARL
分类号 C30B13/32;H01L21/208 主分类号 C30B13/32
代理机构 代理人
主权项
地址