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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS55107245(A)
申请公布日期
1980.08.16
申请号
JP19790013874
申请日期
1979.02.09
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
NAGAKUBO YOSHIHIDE
分类号
H01L27/04;H01L21/3205;H01L21/822;H01L23/52
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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