发明名称 |
Thin-film microcircuits adapted for laser trimming |
摘要 |
Microcircuit structures including thin-film electrical components are provided with a multilayer passivation coating that permits laser trimming of the components through the coating without damaging it. Such a passivation coating suitably includes an underlayer of silicon oxide or other oxygen-containing material and an outer layer of silicon nitride.
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申请公布号 |
US4217570(A) |
申请公布日期 |
1980.08.12 |
申请号 |
US19780910178 |
申请日期 |
1978.05.30 |
申请人 |
TEKTRONIX INC |
发明人 |
HOLMES, ROBERT E |
分类号 |
H01C17/242;H01C1/034;H01C7/00;H01C17/26;H01L27/01;(IPC1-7):H01C7/00;B23K26/00 |
主分类号 |
H01C17/242 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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