发明名称 |
Instrument for polarographic potentiometric, thermal and like measurements and a method of making the same |
摘要 |
A probe having a measuring device for polarographic, potentiometric, thermal and like measurements has a high-resistance transducer which is provided with leads. A body of insulating material is arranged about the transducer and a metal-containing body is arranged about the insulating material. The metal-containing body includes a metal layer which is essentially free of pores and essentially impervious to the diffusion of liquid therethrough and which thus seals the insulating material against contamination by foreign matter. A metal layer which is essentially free of pores and essentially impervious to the diffusion of liquid therethrough may be formed by sputtering the metal onto a substrate using a high-frequency field at an output of 10 to 40 watts per square centimeter of target surface, the sputtering operation being carried out for a period of 5 to 10 minutes in an Ar atmosphere having a pressure of 8 x10-4 torr. An insulating layer may be formed by sputtering an insulating material onto a substrate using a high-frequency field and an atmosphere made up of a protective gas and a reactive gas having partial pressures such that the total pressure of the atmosphere is 8 x10-4 torr.
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申请公布号 |
US4217194(A) |
申请公布日期 |
1980.08.12 |
申请号 |
US19760746328 |
申请日期 |
1976.12.01 |
申请人 |
PLANCK-GESELLSCHAFT, MAX- |
发明人 |
BAUMGARTL, HORST;LUBBERS, DIETRICH W;SAITO, YUKIO |
分类号 |
G01R1/067;G01N27/07;G01N27/30;(IPC1-7):C23C15/00;G01N27/36 |
主分类号 |
G01R1/067 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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