| 摘要 |
PURPOSE:To obtain a vibrator with miniature and highly-reliable electrodes by forming a center electrode by photoetching while constituting a flank electrode of a thin film by selective masking. CONSTITUTION:Center electrode 2 is constituted by providing either of electrodes, formed on both sides, in the center of the main surface of tuning-fork vibrator 1, and electrode 3 is constituted along and flank of the vibrator. Here, electrode 2 is formed by electrode-dividing by photoecthing, and electrode 3 is formed of a thin film by selective masking. Consequently, the vibrator with miniature and highly reliable electrodes can be manufacture. |
