| 发明名称 |
SEMICONDUCTOR DEVICE |
| 摘要 |
A semiconductor device comprising a semiconductor substrate and protective films formed thereon. The protective films comprise at least one silicon carbide film which may be pure or may contain particular impurities. |
| 申请公布号 |
GB1572820(A) |
申请公布日期 |
1980.08.06 |
| 申请号 |
GB19790023196 |
申请日期 |
1976.12.24 |
| 申请人 |
TOKYO SHIBAURA ELECTRIC CO LTD |
发明人 |
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| 分类号 |
H01L21/314;H01L23/29;H01L23/31;(IPC1-7):H01L21/56 |
主分类号 |
H01L21/314 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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