| 摘要 |
PURPOSE:To generate strong parallel ultraviolet rays, by setting a discharge tube in a cavity resonator of semi-coaxial microwave for making no-electrode discharge. CONSTITUTION:A cavity resonator of semi-coaxial microwave is composed of an external conductor 2, internal conductor 3 and end plates 4-7, the cavity length l of the external conductor being adjustable by shifting the end plate 4 and the cavity length l' of the inner conductor by shifting itself, respectively. The inner conductor 3 has a discharge tube 1 on its center line to feed microwave power through a coupling connector 5. The appropriate setting of the cavity lengthes l, l' effectively feeds microwave power in the discharge tube 1 to generate high density plasma for emitting strong and parallel ultraviolet rays. |
