| 摘要 |
PURPOSE:To perform the connection to optical fibers with good efficiency by letting the input and output end faces of the optical plane waveguide make close contact with the optical mirror surfaces on the side of the groove obtained through etching of a substrate of silicon, etc. CONSTITUTION:An oxide film layer 5 of silicon is made on the bottom surface of the groove of inverted trapezoidal shape formed through etching of a silicon substrate 4 and further optical mirror surface layers 6, 7 are made on the both tapered surfaces of the inverted trapezoid. Further, photosensitive resin of a refractive index larger than that of the oxide film layer 5 is packed in the groove of the inverted trapezoid and is removed of unnecessary portions to form an optical plane waveguide 8. The light emitted from the input optical fiber 9 approached to the optical plane waveguide 8 is reflected by the incident side mirror surface 6 of the waveguide 8, is changed of direction and is led into the waveguide 8, where it is subjected to treatment such as branching and attenuating, after which it is again reflected by the exit side mirror surface 7, is changed of direction and is led into output optical fibers 10, 11. |
