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发明名称
Improvements in and relating to sputter-ion vacuum pumps
摘要
申请公布号
GB1031426(A)
申请公布日期
1966.06.02
申请号
GB19630021548
申请日期
1963.05.29
申请人
VARIAN ASSOCIATES
发明人
分类号
H01J41/16;H01J41/20
主分类号
H01J41/16
代理机构
代理人
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