| 摘要 |
<p>PURPOSE:To eliminate the effect of pinhole and improve the yields and reliability of thin film resistor by electrically separating and formation processing of a resistor formation circuit and a capacitor formation circuit. CONSTITUTION:Resistor pattern 4' and capacitor film forming electrode 2' are formed on a substrate, to be insulated and separated from each other. Next, by electroforming, resistor formation 5 and capacitor formation film 6 are formed. Next, by vacuum evaporation, upper conductor electrodes 7', 7'' and 7''' are formed, and required places are connected, and thereby the desired circuit is formed.</p> |
