HUMIDITY DETECTING ELEMENT

摘要

PURPOSE:To provide a compacted humidity detecting element with a high accuracy and a high responsiveness at a low cost by laminating a semiconductive metal oxide layer, a carbon layer and a cathode current collecting layer employing a condictive paste with added silane coupling agent in sequence on a humidity sensitive film of dielectric anode oxide film. CONSTITUTION:A dierectric anode oxide film 2 is formed on the surface of a metal body 1 made of Ta, Ti and Al or the like by the anode oxidization or the like and superlaid with a semiconductive metal oxide film 3 having a contact section 5 and a non-contact space section 4. A carbon layer 6 and a cathode current collecting layer 7 employing a conductive paste added to by a silane coupling agent are formed on the surface thereof. Water in the air is absorbed by the humidity absorbing semiconductive metal oxide film 3 reaching the dielectric anode oxide film 2 to measure. The use of the conductive paste added to by a silane coupling agent for the anode current collecting layer 7 can prevent the secular deterioration in the performance of the dielement. Thus, a humidity detecting element having a long, stable humidity characteristics can be obtained.