| 摘要 |
PURPOSE:To produce the light plane circuit having three-dimensional waveguides of superior characteristics by growing the intermediate layer of low refractive index glass material on glass substrate surface by a CVD method then growing a core part layer of high refractive index glass material. CONSTITUTION:A layer (intermediate layer) 2 of quartz glass containing F or B2O3 is deposited to a desired thickness by a CVD method on a quartz glass substrate 1, after which the layer (core part layer) 3 of quartz glass material containing any of P2O5, GeO2, TiO2, Al2O3 is deposited to a desired thickness. The intermediate layer 2 and core part layer 3 are so worked that their refractive indices are respectively decreased and increased by desired quantities from the quartz glass. This is heated to be converted to transparent glass. The intermediate layer 2 and core part layer 3 are then etched to the specified patterns. In this way, the various light circuit elements which realize the diversification of multimode transmission systems may be realized with good productivity and reliability. |
