发明名称 HALBLEITERANORDNUNG UND VERFAHREN ZU DEREN HERSTELLUNG
摘要 A semiconductor device is fabricated by a process in which an aperture (4) is an insulating layer (3) along a surface (2) of a semiconductor body is utilized in defining the lateral extents of zones (6, 7, and 8) in a circuit element of the device. In particular, the insulating layer is first provided with the aperture along the surface. A semiconductor layer (5) is formed on the insulating layer, including the portion within the aperture. Using the edge of the insulating layer along the aperture as a masking edge, a pair of opposite-conductivity dopants are introduced selectively into the aperture and a third dopant is introduced through all of the aperture into the body. The third dopant may be introduced into the body before the semiconductor layer is formed.
申请公布号 DE3001032(A1) 申请公布日期 1980.07.24
申请号 DE19803001032 申请日期 1980.01.12
申请人 N.V. PHILIPS' GLOEILAMPENFABRIEKEN 发明人 MARIA HART,CORNELIS
分类号 H01L29/73;H01L21/285;H01L21/31;H01L21/331;H01L21/76;H01L21/8222;H01L23/532;H01L27/06;H01L29/423;(IPC1-7):01L29/72;01L23/48;01L21/18;01L21/72 主分类号 H01L29/73
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