| 摘要 |
<p>Semiconductor devices, and in particular solar cells or other photosensitive devices, are fabricated from amorphous material which comprises at least one elemental semiconductor and at least one halogen. Specific examples are elemental germanium or a germanium/silicon compound. One method of deposition is plasma aided chemical vapour deposition from a mixture of gases, e.g. germane or germane and silicon with a halogen bearing gas.</p> |
