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发明名称
METHOD AND APPARATUS FOR MEASURING TEMPERATURE GRADIENT ON SEMICONDUCTOR MATERIAL LAYER
摘要
申请公布号
SU748148(A1)
申请公布日期
1980.07.15
申请号
SU19782647803
申请日期
1978.06.23
申请人
INST VYSOKIKH TEMPERATUR AKAD
发明人
BITYUKOV VLADIMIR K,SU;PETROV VADIM A,SU;REZNIK VALENTIN YU,SU;STEPANOV SERGEJ V,SU
分类号
G01J5/08;(IPC1-7):G01J5/08
主分类号
G01J5/08
代理机构
代理人
主权项
地址
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