| 摘要 |
PURPOSE:To enable crystallizing characteristics of all the growth layers to be measured with simplicity, by changing contact areas on crystal-growth substrate and crystal-growth solvent per growth of each layer at the time when a multi layer aqueous phase growth is to be achieved on the slide basis. CONSTITUTION:At the time when a 3-layer epitaxial growth layer is prepared, a liquid reservoir 4A to keep the solvent for primary layer epitaxial growth, a liquid reservoir 4B to contain the solvent for a secondary layer epitaxial growth and a liquid reservoir 4C to keep the solvent for a third layer epitaxial growth are provided in a movable board 5 made of graphite as depicted in the sketch, and the plane of the solvent reservoir 4C is made smaller than those of other reservoirs. By utilizing thus prepared liquid phase growth boat, epitaxial growth layers 11 through 13 are formed on a crystal growth substrate 1 in turn. As a result, a part of surface of the epitaxial growth layer 12 is exposed so that it is possible to easily measure the crystallizing characteristics of the epitaxial growth layers 12 and 13. |
