| 摘要 |
PURPOSE:To make a film deposited on a substrate homogeneous by fixing only one side of a boat in the vacuum chamber of a vacuum deposition device and freely supporting the other side on a support stand to prevent deformation of the boat bottom due to thermal expansion. CONSTITUTION:When boat 1 is laid between electrodes 3, 7 fixed onto base plate 2, one side of boat 2 is fixed onto electrode 3 with binding means 4, and the other side is freely mounted on support stand 6 and connected to electrode 7 through lead wire 8. Thus, independently of the quality of material and length, boat 1 can be held horizontal to prevent deformation of the boat 1 bottom due to thermal expansion. As a result, the amt. of a material evaporated becomes uniform all over boat 1, and the thickness of a film deposited on a substrate is made uniform. |
